[18a-E202-1~10] 15.4 III-V-group nitride crystals

[18a-E202-8] Growth of AlGaN thin layer by HVPE

〇Daiki Tanaka^1,2, Kentaro Nagamatsu³, Hisashi Yamada², Toshikazu Yamada², Yoshinao Kumagai^4,3, Shugo Nitta³, Yoshio Honda³, Mitsuaki Shimizu², Hiroshi Amano^3,5,6 (1.Nagoya Univ, 2.AIST GaN-OIL, 3.Nagoya Univ.IMaSS, 4.Tokyo Univ.of Agri&Tech, 5.Nagoya Univ.ARC, 6.Nagoya Univ.VBL)

Keywords:HVPE, AlGaN, thin layer growth