[18a-F102-1~7] 1.6 Ultrasonics

△ [18a-F102-1] Measurement of out-of-plane elastic modulus of Cu/Nb multilayer by picosecond ultrasound

〇Daiki Yamakado¹, Nobutomo Nakamura¹, Hirotsugu Ogi² (1.Osaka Univ. Grad. Sch. Eng. Sci., 2.Osaka Univ. Grad. Sch. Eng.)

Keywords:ultrasound, thin film, elastic modulus

Measurement of elastic modulus of metal multilayer has been conducted from the 1970 years. Observed elastic properties were different according to research group. So elastic properties of metallic multilayers are not understood completely. Because some parameters such as elastic moduli of substrate are required to determine elastic modulus, measurement error might be large. We investigate elastic properties of Cu/Nb multilayers by measuring out-of-plane elastic modulus using picosecond ultrasound. It requires only three parameters, mass density, thickness, and propagation time of elastic wave.