[18a-F210-1~13] 6.6 Probe Microscopy

[18a-F210-12] Development of Scanning Microwave Impedance Microscope Using Heterodyne Technique

〇Ryo Izumi¹, Yoshitaka Naitoh¹, Yan Jun Li¹, Yasuhiro Sugawara¹ (1.Osaka Univ.)

Keywords:scanning microwave impedance microscopy

Scanning microwave impedance microscope is one of the most powerful tool that can measure electrical properties of a sample. However, the spatial resolution is poor as compared to other microscope technique such as KPFM.
We developed scanning microwave impedance microscope using heterodyne technique to improve the spatial resolution of the conventional sMIM.
In the presentation, We are going to talk about our heterodyne sMIM and recent results of sMIM imaging.