Fine processing of acrylic resin film by irradiating localized He/O<sub>2</sub> atmospheric pressure plasma jet using a probe microscope with a nanopipette.

Sho Yamamoto; Daisuke Morimatsu; Atsushi Nakamura; Akihisa Ogino; Masaaki Nagatsu; Futoshi Iwata

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.6 Probe Microscopy

[18a-F210-1~13] 6.6 Probe Microscopy

6.6と12.2のコードシェアセッションあり

Sun. Mar 18, 2018 9:00 AM - 12:30 PM F210 (61-210)

Satoshi Katano(Tohoku Univ.)

9:15 AM - 9:30 AM

△ [18a-F210-2] Fine processing of acrylic resin film by irradiating localized He/O₂ atmospheric pressure plasma jet using a probe microscope with a nanopipette.

〇Sho Yamamoto¹, Daisuke Morimatsu¹, Atsushi Nakamura¹, Akihisa Ogino¹, Masaaki Nagatsu², Futoshi Iwata^1,2 (1.Graduate school of Integral Science and Technology, Shizuoka Univ., 2.Research Inst. of Electronics, Shizuoka Univ.)

Keywords:atmospheric pressure plasma jet, nanopipette, fine processing

Presentation information

[18a-F210-1~13] 6.6 Probe Microscopy

6.6と12.2のコードシェアセッションあり

△ [18a-F210-2] Fine processing of acrylic resin film by irradiating localized He/O2 atmospheric pressure plasma jet using a probe microscope with a nanopipette.

△ [18a-F210-2] Fine processing of acrylic resin film by irradiating localized He/O₂ atmospheric pressure plasma jet using a probe microscope with a nanopipette.