[18a-F210-1~13] 6.6 Probe Microscopy

△ [18a-F210-5] Quantitativity of KPFM Using Higher Order Resonance Frequency

〇(PC)Akinori Honda¹, Hiroshi Itoh¹ (1.AIST)

Keywords:KPFM, surface potential, SPM

Kelvin probe force microscopy (KPFM) is one of the AFM family, and a powerful tool that is capable of resolving the surface potential in nanometer scale. In this study, the method of potential measurement using the higher order resonance frequencies was investigated. The surface potentials of the metallic sample and semiconductor sample were analyzed, and the quantitativity of the potentials was studied.