[18a-P3-1~14] 7 Beam Technology and Nanofabrication（Poster）

[18a-P3-11] Progress in the development of elemental imaging method, XANAM (II)

〇Shushi Suzuki¹, Shingo Mukai², Wang-Jae Chun³, Masaharu Nomura⁴, Kiyotaka Asakura² (1.Nagoya Univ., 2.Hokkaido Univ., 3.ICU, 4.KEK-PF)

Keywords:NC-AFM, SR X-ray, Elemental analysis

To investigate elemental and chemical analysis on nano-structures at surfaces/interfaces, we developed X-ray aided noncontact atomic force microscopy (XANAM). We have investigated methods based on force spectra used for principle confirmation and force component analysis, and more rapid measurement methods. In this presentation, we summarize the results so far and report on the study on pursuit of a simple elemental imaging method carried out on recent Ni / HOPG samples.