[18a-P3-1~14] 7 Beam Technology and Nanofabrication（Poster）

[18a-P3-3] Study on heat resistance of multilayer-coated replica gratings for X-rays

〇Takashi Imazono¹, Hiroaki Nishiharah², Ryuichi Ukita², Hiroyuki Sasai², Tetsuya Nagano² (1.QST, 2.Shimadzu Corp.)

Keywords:Multilayer-coated grating, Replica grating, Heat resistance

Multilayer-coated gratings are promising dispersive optical components for tender X-rays which have recently attention. A problem on the heat resistance of multilayer-coated replica gratings has become apparently. To improve heat resistance, multilayer gratings made with a high glass transition temperature resin have been prototyped and evaluated, and consequently the heat resistance temperature has been advanced over 30$^\circ$C higher than conventional replicas.