Improvement in sensitivity of hydrogen gas sensor based on Pt-Wo3/Si microring resonator

Sosuke Matsuura; Naoki Yamasaku; Yasuo Kokubun; Yoshiaki Nishijima; Shinji Okazaki; Taro Arakawa

Presentation information

Oral presentation

3 Optics and Photonics » 3.15 Silicon photonics

[18p-B201-1~14] 3.15 Silicon photonics

Sun. Mar 18, 2018 1:15 PM - 5:30 PM B201 (53-201)

Makoto Okano(AIST), Takeo Maruyama(Kanazawa Univ.), Junichi Fujikata(PETRA)

5:15 PM - 5:30 PM

[18p-B201-14] Improvement in sensitivity of hydrogen gas sensor based on Pt-Wo3/Si microring resonator

〇Sosuke Matsuura¹, Naoki Yamasaku², Yasuo Kokubun², Yoshiaki Nishijima², Shinji Okazaki², Taro Arakawa² (1.Yokohama National Univ, 2.Graduate school of engineering Yokohama National Univ)

Keywords:gas sensor, hydrogen gas

We reported on improvement of film deposition process of hydrogen gas sensor reported previously, and reported improvement.