[18p-C103-1~9] New developments on technologies for flexible ceramics coatings and inorganic/organic hybrid flexible devices

[18p-C103-4] Fabrication of Crystalline Oxide Thin Films on Plastic Substrates: Sol-Gel Transfer Technique

〇Hiromitsu Kozuka¹, Mitsuru Takahashi¹, Niinuma Kota¹, Natsumi Amano¹, Ryosuke Hamano¹, Hiroaki Uchiyama¹ (1.Kansai Univ.)

Keywords:thin film, oxide, plastic

We proposed a technique that realizes crystalline oxide thin films on plastic substrates. The technique is based on sol-gel and transfer, where a firing process guarantees the crystallization of the films. In addition to the description of the technique, the film flexibility, the film/substrate adhesion and the transfer mechanism will be discussed in the talk.