[18p-C104-1~9] 圧電薄膜の基礎技術と応用デバイス

[18p-C104-4] Thin film piezoelectric micro-actuator for HDD application

〇的野 直人¹、Garry Topacio¹、Michael Wong¹ (1.SAE Magnetics)

キーワード：HDD、Piezoelectric、actuator

Advancing areal density requires a challenging combination of technology. One of these challenges is the precise positioning of magnetic heads. Dual stage actuator (DSA) enables better head-positioning accuracy. Thin film piezoelectric actuator has been practical in HDD application to realize higher recording density.