[18p-C204-1~9] Synthesis and plasma processing for 2D sheet materials -from ultra-thin films to atomically thin layered materials-

[18p-C204-9] Summary

〇Masataka Hasegawa¹ (1.AIST)

Keywords:atomic layer materials, ultra thin films, plasma process

As a summary of this symposium, we discuss the current status and problems of atomic layer material / ultra thin film synthesis and future prospects such as the contribution of plasma process.