The 65h JSAP Spring Meeting, 2018

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Symposium (Oral)

Symposium » Ge Technology - Electron / Photon / Phonon / Spin - Innovation of Group-IV Semiconductors -

[18p-C304-1~11] Ge Technology - Electron / Photon / Phonon / Spin - Innovation of Group-IV Semiconductors -

Sun. Mar 18, 2018 1:00 PM - 5:25 PM C304 (52-304)

Kentarou Sawano(Tokyo City Univ.), Katsunori Makihara(Nagoya Univ.)

2:25 PM - 2:40 PM

[18p-C304-5] Barrier height control for metal/Ge contact by using transition-metal nitride

〇Keisuke Yamamoto1, Masatoshi Mitsuhara1, Dong Wang1, Hiroshi Nakashima2 (1.IGSES, Kyushu Univ., 2.GIC, Kyushu Univ.)

Keywords:metal/germanium contact, Fermi level pinning, barrier height