[18p-E201-1~13] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18p-E201-10] Effects of V and N co-doped ZnO buffer layer on growth of ZnO thin film on c-face sapphire

〇Kohtaroh Ohno¹, Tomohiro Kanematsu², Tomoyuki Kawashima², Katsuyoshi Washio² (1.Tohoku Univ., 2.Grad. Sch. Eng. Tohoku Univ.)

Keywords:ZnO, crystal growth, buffer layer