[18p-F202-1~19] 1.1 応用物理一般・学際領域

▲ [18p-F202-16] Al/ZnO nanorods-based microcantilever sensor for high sensitivity CO detection

〇(D)Lia Aprilia^1,2、Ratno Nuryadi³、Makoto Hosoda¹、Yoichiro Neo¹、Arief Udhiarto²、Djoko Hartanto²、Hidenori Mimura¹ (1.Shizuoka Univ.、2.UI、3.BPPT)

キーワード：microcantilever, ZnO nanorods, Al doping

Microcantilever is prospective to be applied as a gas sensor at room temperature. In this work, zinc oxide nanorods (ZnO NRs) was coated on the microcantilever as a sensitive layer for CO detection. To increase sensing response, aluminium (Al) atom was doped on ZnO NRs-coated microcantilever (AZNMC) by a sputtering technique. Figure 1(a) shows electron probe microanalyzer (EPMA) micrograph of AZNMC. High concentration of Al arised where the ZnO NRs exist, which indicated that Al was selectively combined with the crystal structure of NRs. The sensing property was investigated by measuring resonance frequency profile of the vibrating microcantilever in varied gas concentration. In addition, the highest sensitivity was obtained for CO gas compared to the other gases, i.e., CO₂ and CH₄, as shown in Fig. 1(b). The CO gas sensing response in femto-gram order was observed. The presence of Al atoms in ZnO NRs generates strong interaction between CO and Al-doped ZnO NRs enhancing the sensitivity to CO. This result opens the possibility of AZNMC to be applied as highly sensitive CO sensor.