The 65h JSAP Spring Meeting, 2018

Presentation information

Print

Special Symposium

Special Symposium » SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)

[18p-G201-1~16] SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)

Sun. Mar 18, 2018 1:00 PM - 6:30 PM G201 (63-201)

Minoru Sasaki(Toyota Tech. Inst.), Toshiyuki Tsuchiya(Kyoto Univ.), Eiji Higurashi(Univ. of Tokyo)

4:30 PM - 4:45 PM

[18p-G201-10] High Resolution Tactile Sensing Realized by Integrated Silicon MEMS Technology

〇Hidekuni Takao1 (1.Kagawa Univ.)

Keywords:Tactile Sensor, High Resolution, Silicon MEMS