6:15 PM - 6:30 PM
[18p-G201-16] Looking back on MEMS of Microelectronics for half a century
Keywords:MEMS, microelectronics, integrated sensor
Presentation information
Special Symposium
Special Symposium » SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)
[18p-G201-1~16] SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)
Sun. Mar 18, 2018 1:00 PM - 6:30 PM G201 (63-201)
Minoru Sasaki(Toyota Tech. Inst.), Toshiyuki Tsuchiya(Kyoto Univ.), Eiji Higurashi(Univ. of Tokyo)