The 65h JSAP Spring Meeting, 2018

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Special Symposium » SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)

[18p-G201-1~16] SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)

Sun. Mar 18, 2018 1:00 PM - 6:30 PM G201 (63-201)

Minoru Sasaki(Toyota Tech. Inst.), Toshiyuki Tsuchiya(Kyoto Univ.), Eiji Higurashi(Univ. of Tokyo)

1:05 PM - 1:35 PM

[18p-G201-2] [Keynote Speech] Start of “the study group of the integrated MEMS” and Interdisciplinary Research

〇Makoto Ishida1 (1.Toyohashi Tech.)

Keywords:integrated MEMS, LSI technology, sensor/MEMS

“The study group of the integrated MEMS” was established on May, 2009, and the MEMS related field was new topics in this society. The episode of the establishment of the study group and some interdisciplinary researches of the fusion of both LSI technology and MEMS technology are introduced, and the significance of the study group is indicated.