The 65h JSAP Spring Meeting, 2018

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Special Symposium » SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)

[18p-G201-1~16] SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)

Sun. Mar 18, 2018 1:00 PM - 6:30 PM G201 (63-201)

Minoru Sasaki(Toyota Tech. Inst.), Toshiyuki Tsuchiya(Kyoto Univ.), Eiji Higurashi(Univ. of Tokyo)

1:35 PM - 2:05 PM

[18p-G201-3] [Keynote Speech] Challenges and Prospects of Integrated CMOS-MEMS Technology

〇Kazuya Masu1 (1.FIRST, Tokyo Tech)

Keywords:CMOS, MEMS, Integrataion

The study group of Integrated MEMS celebrates its 10th anniversary. Let's take a close look at the semiconductors and MEMS related technology at the time of establishment, and the current situation once again. These will lead to next-10-years' thinking of the present study group, JSAP, and the future of Japanese industry.