[18p-P2-1~10] 6.5 Surface Physics, Vacuum

△ [18p-P2-5] XPS spectrum analysis by Active Shirley method using reference spectrum

〇(B)Kazuki Nakamura¹, Murakami Ryo¹, Kataoka Noriyuki¹, Kageyama Hironori¹, Tanaka Hiromi¹, Matsumoto Ryo^2,3, Shinozuka Hiroshi², Yoshikawa Hideki², Tanuma Shigeo², Yoshihara Kazuhiro⁴ (1.NIT,Yonago college, 2.NIMS, 3.Tsukuba Univ., 4.Scienta Omicron, Inc)

Keywords:surface analysis, X-ray Photoelectron Spectroscopy, Spectrum decomposition