[18p-P2-1~10] 6.5 Surface Physics, Vacuum

[18p-P2-7] Molecular Dynamics Study of Tribological Phenomena at Interfaces
between Polymers and Substrates with Atomic-scale Roughness

〇Yuya Miyashita¹, Kazuhiro Tada¹, Masaaki Yasuda², Yoshihiko Hirai² (1.NIT, Toyama Coll., 2.Osaka Pref Univ.)

Keywords:Tribology, Molecular Dynamics

Understanding the friction and lubrication phenomena occurring in the narrow region of the nanoscale is important in nanotechnology fields such as nanofabrication process and nanofluidics engineering. In recent years, in order to advance nanoimprint technology, it is necessary to understand the nanoscale friction phenomenon which occurs between the material to be molded and the mold and the substrate at the time of molding. In this study, shear stress and viscosity acting between metal substrate having roughness and polymer material are calculated by molecular dynamics simulation and the relation with shear rate, film thickness, etc. is investigated.