[18p-P5-1~22] 12.6 Nanobiotechnology

[18p-P5-7] Evaluation of Al₂O₃ coating micropores for single-particle detections

〇Tomoki Hayashida¹, Takahito Ohshiro¹, Makusu Tsutsui¹, Masateru Taniguchi¹ (1.ISIR)

Keywords:micropore, ALD

We fabricated a micropore device coating with Al₂O₃ using atomic layer deposition (ALD). We formed Al₂O₃ membrane in the range of 1nm to 6 nm on a Si micropore device. Using this device, we measured ionic current changes when particles pass through micropores and investigated pulse size and changes of detection frequency comparing each Al₂O₃ thickness. When we used carboxylated-polystyrene beads (φ0.78 μm), pulse size increased depending on Al₂O₃ layer thickness.