[18p-P6-1~18] 13.2 Exploratory Materials, Physical Properties, Devices

[18p-P6-11] Modification of Si-based Nanosheets by Metal Chloride Treatment

Kazuma Konishi¹, Yuya Kujime¹, Tsubasa Kato¹, Yuki Kumazawa², Naohisa Takahashi³, Naoki Nanba³, 〇Hirokazu Tatsuoka² (1.Fac. Eng., Shizuoka Univ., 2.Grad. Sch. Integr. Sci. & Technol., Dept. Eng., Shizuoka Univ., 3.Yamaha Central Research Lab.)

Keywords:Nanosheet, Metal Chloride