The 65h JSAP Spring Meeting, 2018

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13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[18p-P6-1~18] 13.2 Exploratory Materials, Physical Properties, Devices

Sun. Mar 18, 2018 1:30 PM - 3:30 PM P6 (P)

1:30 PM - 3:30 PM

[18p-P6-7] Optimization of donor activation conditions in Sb-doped β-FeSi2 epitaxial films

〇Hajime Eguchi1, Motoki Iinuma1, Hirofumi Hoshida1, Naoki Murakoso1, Yoshikazu Terai1 (1.Kyushu Inst. of Tech.)

Keywords:beta-FeSi2, control of electron density