1:30 PM - 3:30 PM
[18p-P7-6] Influence of film composition on conduction current in silicon nitride films after exposure to ultraviolet illumination
Keywords:silicon nitride film
Poster presentation
13 Semiconductors » 13.3 Insulator technology
Sun. Mar 18, 2018 1:30 PM - 3:30 PM P7 (P)
1:30 PM - 3:30 PM
Keywords:silicon nitride film