[19a-A204-1~10] 12.3 Functional Materials and Novel Devices

[19a-A204-10] Organic Nanodevices Using Fullerene-Containing Electrically Conducting Electron Beam Resist

〇Anri Nakajima¹, Tetsuo Tabei¹, Tatsuya Yasukawa¹ (1.RNBS Hiroshima Univ.)

Keywords:Electron Beam Resist, Fullerene, Organic Nanodevices

Recently, organic electrical devices have attracted attention because of their unique advantages of low weight and high mechanical flexibility. In the feild of organic electronics, one of the remaining issues is how to make nanodevices for the large scale integration. This time, we gave an electrical conductivity to an organic electron beam resist by containing fullerene molecules to the resist and fabricated organic nanodot and nanowire structures by a simple method only with an electron beam exposure and the development.