Liquid viscosity evaluation in the MHz-GHz range by using the quasi-shear mode resonator consisting of c-axis tilted ScAlN thin films/quartz crystal substrate

Presentation information

Oral presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

Mon. Mar 19, 2018 9:00 AM - 11:45 AM B303 (53-303)

Masashi Suzuki(Univ. of Yamanashi)

10:30 AM - 10:45 AM

〇(M1)Yui Yamakawa^1,2, Rei Karasawa^1,2, Takahiko Yanagitani^1,2,3 (1.Waseda Univ., 2.ZAIKEN, 3.JST-PRESTO)

Keywords:ScAlN, glycerin, viscosity sensor