[19a-B303-1~10] 1.6 Ultrasonics

△ [19a-B303-9] Flexible Piezoelectric Device Fabrication based on Continuous Sol-Gel Spraying Technique

〇Kei Nakatsuma¹, Ippei Torigoe¹, Makiko Kobayashi¹ (1.Kumamoto Univ.)

Keywords:piezoelectric device, flexible ultrasound device

We are currently developing a flexible piezoelectric ultrasound device. We employ the sol-gel spraying technique which fabricates a piezoelectric film by spraying. We established the continuouus sol-gel spraying technique which enables an autonomous and long-time spraying and are currently evaluating the new technique. In this report, we show our latest results of the ultrasound characteristic test of the piezoelectric film fabricated with the continuous sol-gel spraying technique. Additionally, we demonstrate the packaging technique of the thick and flexible piezoelectric device.