11:15 AM - 11:30 AM
[19a-C101-9] SiC Nanodots Formation in Bulk-Si using Hot C+ Ion Implantation Substrate (Ⅲ):C Dose Dependency
Keywords:SiC, hot ion impantation, quantum dot
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Mon. Mar 19, 2018 9:15 AM - 11:45 AM C101 (52-101)
Kuniyuki Kakushima(Titech)
11:15 AM - 11:30 AM
Keywords:SiC, hot ion impantation, quantum dot