[19a-E201-1~7] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19a-E201-1] Correspondence between PL spectra and conductive properties of ZnO films - II

〇Housei Akazawa¹ (1.NTT DIC)

Keywords:ZnO, photoluminescence, donor

Identification of donors in ZnO crystals is a long standing problem. We have launched combination study to verify one-to-one correspondence between electronic transport properties and defect levels probed by photoluminescence. We studied the effect of growth temperature and plasma irradiation and identified V_Zn and V_O, from which we discuss the pertinent donors.