[19a-F214-1~11] 6.5 Surface Physics, Vacuum

△ [19a-F214-11] Application and Evaluation of New Non-Evaporable Getter (NEG) Coating

〇(D)Tetsuya Miyazawa¹, Masashi Kurihara², Shinya Ohno², Naoya Terashima³, Yuto Natsui³, Hiroo Kato³, Yu Kano⁴, Yasuo Nakayama⁴, Yoshihiro Kato⁵, Ayako Hashimoto⁶, Masuaki Matsumoto⁷, Markus Wilde⁸, Katsuyuki Fukutani⁸, Takashi Kikuchi⁹, Kazuhiko Mase^1,9 (1.SOKENDAI, 2.Yokohama Nat. Univ., 3.Hirosaki Univ., 4.Tokyo Univ. of Sci., 5.Irie Koken, 6.NIMS, 7.Tokyo Gakugei Univ., 8.Univ. of Tokyo, 9.KEK-IMSS)

Keywords:non-evaporable getter, Titanium, Palladium

Non-evaporable getter (NEG) coatings are oil-free, vibration-free, energy-saving, magnetic-field-free. The pumping speeds of the conventional NEG thin films were reduced by repeated heating-venting cycles. We have developed a new NEG coating that the pumping speed is durable against repeated heating-venting cycles by coating with a 1-μm Ti thin film and then coating with a 10-nm Pd thin film under ultrahigh vacuum. In this presentation we will report on pumping properties and structure etc of the Pd/Ti thin films.