The 65h JSAP Spring Meeting, 2018

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Oral presentation

13 Semiconductors » 13.5 Semiconductor devices and related technologies

[19a-G203-1~9] 13.5 Semiconductor devices and related technologies

Mon. Mar 19, 2018 9:00 AM - 12:00 PM G203 (63-203)

Masaharu Kobayashi(Univ. of Tokyo), Tetsuo Endoh(Tohoku Univ.)

11:30 AM - 11:45 AM

[19a-G203-8] [The 9th Silicon Technology Division Award Speech] Ultrahigh-Q photonic crystal nanocavities fabricated by CMOS process technologies

〇Kohei Ashida1 (1.Osaka Pref. Univ.)

Keywords:Silicon Technology