[19a-P6-1~79] 17 Nanocarbon Technology（Poster）

△ [19a-P6-50] Graphene-FET Biosensor Arrays

〇Shota Ushiba¹, Takao Ono², Masami Tanioku², Aki Kuromatsu², Yasushi Kanai², Koichi Inoue², Masahiko Kimura¹, Kazuhiko Matsumoto² (1.Murata Manufacturing, 2.ISIR, Osaka Univ.)

Keywords:graphene, biosensor, device

We developed a measurement system for graphene FET (G-FET) biosensor arrays. The G-FET arrays were made by transferring CVD-grown graphene films onto Si/SiO₂ substrates. A variation in properties of G-FETs was visualized by using out measurement system. We also demonstrated that our measurement system detected Bovine serum albumin molecules with low of detection limit of 10 fM.