A Study of Module using MEMS Inertial Sensor by Multi-layer Metal Technology (2)

Tatsuya Koga; Motohiro Takayasu; Daisuke Yamane; Hiroyuki Ito; Toshifumi Konishi; Shiro Dosho; Noboru Ishihara; Katsuyuki Machida; Kazuya Masu

Presentation information

Symposium (Oral)

Symposium » Integrated Sensor Systems for Ubiquitous Health Care Applications

[19p-C101-1~12] Integrated Sensor Systems for Ubiquitous Health Care Applications

Mon. Mar 19, 2018 1:45 PM - 7:05 PM C101 (52-101)

Masato Koyama(TOSHIBA), Ken Uchida(Keio Univ.), Masato Sone(Titech)

6:20 PM - 6:35 PM

[19p-C101-10] A Study of Module using MEMS Inertial Sensor by Multi-layer Metal Technology (2)

〇Tatsuya Koga¹, Motohiro Takayasu¹, Daisuke Yamane¹, Hiroyuki Ito¹, Toshifumi Konishi^1,2, Shiro Dosho¹, Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT)

Keywords:MEMS, Inertial Sensor, noise

« Previous in this session
Next in this session »

▲