[19p-C101-1~12] Integrated Sensor Systems for Ubiquitous Health Care Applications

[19p-C101-7] High-Sensitivity CMOS-MEMS Inertial Sensor Technology and Its Application System

〇Hiroyuki Ito¹, Daisuke Yamane¹, Toshifumi Konishi¹, Shiro Dosho¹, Noboru Ishihara¹, Katsuyuki Machida¹, Masato Sone¹, Yoshihiro Miyake¹, Kazuya Masu¹ (1.Tokyo Tech)

Keywords:Inertial Sensor, Accelerometer, CMOS-MEMS

Our group is researching technologies and application systems of inertial sensors providing micro-G-order resolution and small form-factor. We exploit integrated CMOS-MEMS technology, MEMS accelerometer technology using a high-density Au proof mass, and low-noise circuit technology for achieving highest resolution in MEMS accelerometers. This paper mainly introduces challenges for improving resolution of MEMS accelerometers, and device and circuit technologies for accelerometers with sub-1mG resolution.