[19p-C103-1~8] Advanced 3D atomic imaging to develop new materials and devices technologies

[19p-C103-3] Current Status of Local Structure Analyses Using Advanced Electron Microscopy

〇Koji Kimoto¹, Takuro Nagai¹, Jun Kikkawa¹, Shunsuke Yamashita¹ (1.NIMS)

Keywords:Electron Microscopy

Recent advanced electron microscopy for material characterizations is reviewed. Thanks to the development of a spherical aberration corrector and a monochromator, spatial and energy resolution has been substantially improved. Here we show a few results obtained using advanced electron microscopy such as dopant observation, high precision measurement of atomic sites, quantitative observation of monolayer nanomaterials, and Li mapping.