[19p-C104-1~19] 6.1 Ferroelectric thin films

△ [19p-C104-15] Crystallographic deformation of Pb(Zr,Ti)O₃ thin films with different composition under voltage application

〇(P)Geng Tan¹, Kazuki Maruyama¹, Yuya Kanamitsu¹, Shintaro Nishioka¹, Hiroki Osaka¹, Tomoyuki Koganezawa², Toshihito Umegaki¹, Isaku Kanno¹ (1.Kobe Univ., 2.JASRI)

Keywords:in-situ XRD observation, PZT thin films, analysis of crystal structures

In order to understand the piezoelectric effect, it is essential to investigate crystallographic deformation of piezoelectric thin films. In this study, we measured the synchrotron X-ray diffraction (XRD) of PZT thin films with different composition under applied DC voltages. We ascertained the change of lattice parameter of crystal in both out of plane and in-plane measurements. We also compare and discuss the piezoelectric coefficients obtained from in-situ XRD and cantilever method.