[19p-F206-1~10] 6.2 Carbon-based thin films

[19p-F206-5] Optimization of Chemical Bonding Structure and Improvement of Output Characteristics of Optical Gap Tunable Si-added Amorphous Carbon Solar Cells by Controlling of Deposition Frequency

〇Yuta Shimizu¹, Yuta Waki¹, Yu Saito¹, Hiroshi Naragino¹, Kensuke Honda¹ (1.Yamaguchi Univ)

Keywords:solar cell, carbon material

In this study, heterojunction solar cells comprising n-type Si-added amorphous carbon (a-C) film and p-type Si substrate were developed by using plasma-enhanced chemical vapor deposition for multi-junction solar cell. sp² carbon cluster might be factor for lower of conversion efficiency. In order to improve the conversion efficiency of Si-added a-C/p-Si heterojunction solar cells, reduction of sp² carbon in the film by increasing frequency of plasma was attempted.