[19p-P11-1~31] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19p-P11-6] The influence of argon gas on the spatial distribution of electrical and structural properties in transparent conductive Al-doped ZnO polycrystalline films deposited by magnetron sputtering

〇Junichi Nomoto¹, Hisao Makino¹, Tetsuya Yamamoto¹ (1.Research Inst. Kochi Univ. Tech.)

Keywords:transparent conducting film, ZnO