[19p-P2-1~9] 1.6 Ultrasonics

[19p-P2-2] On Kanazawa-Gordon equation of AT-cut and SC-cut in QCM sensors

Shin-ya Watanabe, 〇Yasuaki Watanabe, Yunhao Ma, Takayuki Sato

Keywords:quartz crystal microbalance, SC-cut, Kanazawa-Gordon equation

Generally, a lot of AT-cut quartz crystal resonator is used for QCM, but is developing the sensor which SC-cut was applied to in this research. The reason is two points of SC-cut utilized way having almost none of the examples and the way that can have thickness flexura in not only thickness shear which it is considered in AT-cut but also SC-cut in QCM.
An outline was explained in the Japan Society of Applied Physics (2016 autumns) of the meeting before last here, but the method for the close solution is considered using an equation of Kanazawa-Gordon this time.