LLSAW propagation characteristics for ScAlN film/Quartz or Sapphire substrate

Presentation information

Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P2 (P)

1:30 PM - 3:30 PM

〇Naoya Sawada¹, Masashi Suzuki¹, Shoji Kakio¹ (1.Univ. of Yamanashi)

Keywords:Surface Acostic Wave device, ScAlN Film