The 65h JSAP Spring Meeting, 2018

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Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

[19p-P2-1~9] 1.6 Ultrasonics

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P2 (P)

1:30 PM - 3:30 PM

△ [19p-P2-8] LLSAW propagation characteristics for ScAlN film/Quartz or Sapphire substrate

〇Naoya Sawada1, Masashi Suzuki1, Shoji Kakio1 (1.Univ. of Yamanashi)

Keywords:Surface Acostic Wave device, ScAlN Film