The 65h JSAP Spring Meeting, 2018

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[19p-P4-1~15] 6.2 Carbon-based thin films

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P4 (P)

1:30 PM - 3:30 PM

[19p-P4-5] Structural analysis of a-CNx:H films fabricated from the decomposition of CH3CN induced by the microwave plasma of Ar

〇(M1)Chitose Sekizaki1, Fu Dong1, Hidetoshi Saitoh1, Haruhiko Ito1 (1.Nagaoka Univ. of Tech.)

Keywords:Carbon nitride