[19p-P5-1~39] 6.3 Oxide electronics

[19p-P5-20] Fabrication of near-infrared transparent conductive IWO thin film using pressure gradient type plasma gun

〇Yusuke Kondo¹, Noriaki Hashimoto², Eiji Furuya², Yoshiharu Kakehi¹, Takashi Mori¹, Yoshiharu Yamada¹, Takeshi Tanaka¹ (1.ORIST, 2.Chugairo Co., Ltd.)

Keywords:TCO, pressure gradient type plasma gun, IWO