[19p-P6-1~17] 6.4 Thin films and New materials

[19p-P6-11] Preparation of AlN thin films on natural expanded graphite sheet

〇Hoshito Murakawa¹, Kosei Yamaguchi¹, Takashi Inoue², Hiroshi Okano¹ (1.National Institute of Technology, Kagawa College, 2.Toyo Tanso Co.,Ltd.)

Keywords:aluminum nitride, natural expanded graphite sheet

We are studying LED devices using natural expanded graphite sheet (graphite sheet) as substrate. We have reported that GaN crystals grown on graphite sheet by MBE method emit PL light. However, the emission intensity is weaker than when sapphire is used as a substrate. In order to improve the performance, it is necessary to improve the crystal quality of GaN. In this study, AlN was fabricated on graphite sheets prepared under various conditions and evaluated as a buffer layer.