[19p-P6-1~17] 6.4 Thin films and New materials

[19p-P6-17] Characteristics of LiPON film manufactured by MOCVD method for solid electrolyte

〇Sadayuki Ukishima¹, Naoki Tsukahara¹ (1.ULVAC Inc.)

Keywords:all-solid-state, MOCVD, Lithium ion secondary battery

As a next generation secondary battery with high safety, an all-solid-state battery using a solid electrolyte is expected. In order to reduce the resistance of the cell, it is necessary to reduce the thickness of the electrolyte layer. However, when the sputtering and vapor deposition techniques are used, it is difficult to form a uniform film on a three-dimensional object.We have deposited lithium phosphorus oxynitride ( LiPON ) by using MOCVD method. By the optimization of the CVD conditions, stable deposition and uniform coating of the LiPON film on a three-dimensional substrate became possible.