Structure Evaluation of Piezoelectric Nitride Alloy Sc<sub>x</sub>Al<sub>1-x</sub>N by First Principles Calculation

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P6 (P)

1:30 PM - 3:30 PM

〇Kazuya Eto¹, Hiroshi Yamada^1,2, Masato Uehara^1,2, Morito Akiyama² (1.Kyushu Univ., 2.AIST)

Keywords:piezoelectricity, first principles calculation, low-pass filter