[20a-A402-1~11] 3.9 Terahertz technologies

[20a-A402-4] Fabrication of 3-dimensional terahertz devices using 3D printing and metallic coating by supercritical fluid deposition

Yu Zhao¹, Hirotaka Morishita², Kuniaki Konishi³, Hiroyuki Yasukochi³, Kentaro Soeda³, Junji Yumoto³, Makoto Kuwata-Gonokami³, Yusuke Shimoyama¹, Yukihiro Shimogaki¹, 〇Takeshi Momose¹ (1.Graduate Sch. of Eng., Univ. of Tokyo, 2.Sch. of Eng., Univ. of Tokyo, 3.Graduate Sch. of Sci., Univ. of Tokyo)

Keywords:supercritical fluid deposition, 3D terahertz devices, 3D printer

We developed a novel method to fabricate 3D terahertz devices with any architecture, which consists of a high-resolution 3D printing to form fine polymer structures, followed by its metallic film coating. The coating is enabled by making use of supercritical fluid deposition (SCFD), possible to form thin films uniformly onto the high-aspect-ratio 3D structures. Details of the process and devices will be reported onsite.