The 65h JSAP Spring Meeting, 2018

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[20a-B303-1~11] 7.2 Applications and technologies of electron beams

Tue. Mar 20, 2018 9:45 AM - 12:45 PM B303 (53-303)

Yoichiro Neo(Shizuoka Univ.)

10:15 AM - 10:30 AM

[20a-B303-3] GOS type Cathode as electron source loaded SEM

〇Joji Miyaji1,2, Katsuhisa Murakami2, Masayoshi Nagao2, Yoichiro Neo1, Hidenori Mimura1 (1.Shizu Univ., 2.AIST)

Keywords:graphene, fiele emission cathode, scanning electron microscope