Deflection sensitivity of self-sensing cantilever using electron-beam-deposited Pt

Kenta Kashida; Fujio Wakaya; Katsuhisa Murakami; Hayato Yamashita; Yuji Miyato; Satoshi Abo; Masayuki Abe

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[20a-B303-1~11] 7.2 Applications and technologies of electron beams

Tue. Mar 20, 2018 9:45 AM - 12:45 PM B303 (53-303)

Yoichiro Neo(Shizuoka Univ.)

11:45 AM - 12:00 PM

[20a-B303-8] Deflection sensitivity of self-sensing cantilever using electron-beam-deposited Pt

Kenta Kashida¹, 〇Fujio Wakaya¹, Katsuhisa Murakami², Hayato Yamashita^1,3, Yuji Miyato¹, Satoshi Abo¹, Masayuki Abe¹ (1.Osaka Univ., 2.AIST, 3.JST PRESTO)

Keywords:beam-induced deposition, cantilever

Dependences of deflection sensitivity on the sensor thickness and post annealing temperature are investigated in order to improve the sensitivity of self-sensing cantilever using electron-beam-deposited Pt. The best sensitivity was realized with the thickness of 115 nm and 250 ^oC annealing.