[20a-B401-1~6] 7.3 Micro/Nano patterning and fabrication

[20a-B401-1] Fabrication of Linear Optical Fiber Arrays with Squared Fiber Ends for the Use of Matrix Projection Exposure

〇Toshiyuki Horiuchi¹, Jun-ya Iwasaki¹, Jun Watanabe¹, Yuta Suzuki¹ (1.Tokyo Denki Univ.)

Keywords:optical lithography, optical fiber array, projection exposure system

A new exposure system for the use of lithography for printing rough large patterns easily and inexpensively is under development. In the system, patterns are printed using a linear array of optical fibers with squared ends. Dark and bright distributions are given by injecting light to assigned fibers using light emitting diodes or laser proves, and arbitrary linear patterns are projected on a wafer coated with a resist film. For this reason, how to fabricate long linear arrays with squared ends accurately was investigated. As a result, 40 optical fibers with a nominal diameter of 500 μm were successfully squared in a line. Measured fiber sizes were 497±3 µm and 493±3µm in vertical and horizontal directions, respectively. Promising fiber arrays were obtained successfully.